{"id":3806,"date":"2023-08-15T08:38:54","date_gmt":"2023-08-15T00:38:54","guid":{"rendered":"http:\/\/www.wangkaixuan.tech\/?p=3806"},"modified":"2023-09-12T11:42:43","modified_gmt":"2023-09-12T03:42:43","slug":"%e5%85%89%e5%88%bb%e5%b7%a8%e4%ba%ba%ef%bc%88%e6%8c%81%e7%bb%ad%e6%9b%b4%e6%96%b0%ef%bc%89","status":"publish","type":"post","link":"http:\/\/www.wangkaixuan.tech\/?p=3806","title":{"rendered":"\u5149\u523b\u5de8\u4eba-01"},"content":{"rendered":"\n<h1 class=\"wp-block-heading\">0.\u524d\u8a00<\/h1>\n\n\n\n<p>\u5728\u8bfb\u8fd9\u672c\u4e66\u4e4b\u524d\uff0c\u5efa\u8bae\u5927\u5bb6\u5148\u770b\u770b<a href=\"https:\/\/www.bilibili.com\/video\/BV1Av4y1272D\">\u8fd9\u6761\u89c6\u9891<\/a>\u626b\u4e2a\u76f2\uff0c\u6216\u8005\u770b\u4e0b<a href=\"https:\/\/space.bilibili.com\/612932327\/channel\/collectiondetail?sid=26101\">\u8001\u77f3\u8c08\u82af<\/a>\u5173\u4e8e\u5149\u523b\u673a\u548c\u82af\u7247\u6280\u672f\u7684\u5185\u5bb9\uff0c\u518d\u770b\u8fd9\u672c\u4e66\u5c31\u4e0d\u4f1a\u90a3\u4e48\u61f5\u4e86\u3002<\/p>\n\n\n\n<p>\u5149\u523b\u673a\u662f\u96c6\u7cbe\u5bc6\u5149\u5b66\u3001\u7cbe\u5bc6\u673a\u68b0\u3001\u81ea\u52a8\u5316\u63a7\u5236\u548c\u8f6f\u4ef6\u5de5\u7a0b\u4e8e\u4e00\u4f53\u7684\u7cfb\u7edf\uff0c\u5b83\u4e0d\u4ec5\u8981\u5b9e\u73b0\u6781\u9ad8\u7684\u66dd\u5149\u5206\u8fa8\u7387\uff0c\u800c\u4e14\u8981\u5177\u6709\u6781\u9ad8\u7684\u91cd\u590d\u5b9a\u4f4d\u7cbe\u5ea6\u3002\u5148\u8fdb\u5149\u523b\u673a\u4e5f\u88ab\u55bb\u4e3a\u96c6\u6210\u7535\u8def\u88c5\u5907\u5236\u9020\u4e1a\u4e2d\u201c\u7687\u51a0\u4e0a\u7684\u660e\u73e0\u201d\u3002<\/p>\n\n\n\n<p>ASML\u81ea\u8eab\u5219\u4e13\u6ce8\u4e8e\u5149\u523b\u673a\u7cfb\u7edf\u7684\u96c6\u6210\u548c\u4e0b\u4e00\u4ee3\u4ea7\u54c1\u7684\u8bbe\u8ba1\u3002<\/p>\n\n\n\n<p>\u7f29\u5199\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Natlab\uff1a\u98de\u5229\u6d66\u4eab\u6709\u76db\u8a89\u7684\u524d\u6cbf\u6280\u672f\u7814\u53d1\u5b9e\u9a8c\u5ba4\uff0c\u662f\u5149\u523b\u673a\u548c\u5404\u9879\u6838\u5fc3\u6280\u672f\u8bde\u751f\u7684\u6447\u7bee\u3002<\/li>\n\n\n\n<li>Elcoma\uff1a\u98de\u5229\u6d66\u7684\u534a\u5bfc\u4f53\u548c\u6750\u6599\u90e8\uff0c\u662f\u5149\u523b\u673a\u7684\u9700\u6c42\u65b9\uff0c\u7ecf\u5e38\u662fASML\u7684\u7b2c\u4e00\u4e2a\u5ba2\u6237\u3002<\/li>\n\n\n\n<li>S&amp;I\uff1a\u98de\u5229\u6d66\u79d1\u5b66\u4e0e\u5de5\u4e1a\u90e8\uff0c\u8d1f\u8d23\u5de5\u4e1a\u5316\u4ea7\u54c1\u7684\u91cf\u4ea7\uff0c\u5305\u62ec\u5149\u523b\u673a\u7684\u91cf\u4ea7\u3002ASML\u662fS&amp;I\u548cASM\u56fd\u9645\u516c\u53f8\u7684\u5408\u8d44\u4f01\u4e1a\u3002<\/li>\n\n\n\n<li>CFT\uff1a\u98de\u5229\u6d66\u5236\u9020\u6280\u672f\u4e2d\u5fc3\uff0c\u8d1f\u8d23\u63d0\u4f9b\u4ea7\u54c1\u5de5\u7a0b\u5316\u7684\u6280\u672f\u652f\u6301\u3002<\/li>\n\n\n\n<li>Perkin-Elmer\uff1a\u6700\u65e9\u9500\u552e\u5de5\u4e1a\u7528\u5149\u523b\u673a\u5e76\u9886\u5148\u5e02\u573a\u7684\u7f8e\u56fd\u516c\u53f8\u3002<\/li>\n\n\n\n<li>GCA\u7684David Mann\u516c\u53f8\uff1a\u7ee7Perkin-Elmer\u540e\u5149\u523b\u673a\u9886\u57df\u7684\u524d\u6cbf\u516c\u53f8\u3002\uff08\u4e00\u5bb6\u7f8e\u56fd\u516c\u53f8\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u5149\u523b\u673a\u540d\u79f0\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Lithography\uff08\u7b80\u79f0Litho\uff09\uff1a\u5149\u523b\u3002<\/li>\n\n\n\n<li>Photo repeater\uff1a\u6700\u65e9\u7684\u5149\u523b\u673a\uff0c\u91cd\u590d\u66dd\u5149\u5149\u523b\u673a\u3002\uff08GCA\u7684David Mann\u516c\u53f8\u5f00\u53d1\uff0c\u5148\u5de5\u5149\u523b\u673a\u5236\u4f5c\u63a5\u89e6\u5f0f\u63a9\u819c\uff0c\u7136\u540e\u518d\u5370\u5230\u6676\u5706\u4e0a\uff09<\/li>\n\n\n\n<li>Aligner\uff1a\u5bf9\u9f50\u5149\u523b\u673a\uff0c\u7528\u6765\u4fdd\u8bc1\u5957\u523b\u7684\u51c6\u786e\u6027\u3002<\/li>\n\n\n\n<li>Stepper\uff1a\u6b65\u8fdb\u5149\u523b\u673a\uff0c\u4e00\u6b21\u66dd\u5149\u6676\u5706\u7684\u4e00\u4e2a\u533a\u57df\u3002<\/li>\n\n\n\n<li>Scanner\uff1a\u626b\u63cf\u5149\u523b\u673a\uff0c\u7528\u5149\u7f1d\u626b\u63cf\u7684\u65b9\u5f0f\u66dd\u5149\u6676\u5706\u7684\u4e00\u4e2a\u533a\u57df\u3002<\/li>\n\n\n\n<li>Lithography system\uff1a\u5149\u523b\u7cfb\u7edf\u6216\u5149\u523b\u673a\u3002\u73b0\u4ee3\u5149\u523b\u673a\u662fStepper\u548cScanner\u7684\u7ed3\u5408\u4f53\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u540d\u8bcd\u89e3\u91ca\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6676\u5706\uff1a\u9ad8\u7eaf\u5ea6\u7684\u591a\u6676\u7845\u6eb6\u89e3\u540e\u63ba\u5165\u7845\u6676\u4f53\u6676\u79cd\uff0c\u7136\u540e\u6162\u6162\u62c9\u51fa\uff0c\u5f62\u6210\u5706\u67f1\u5f62\u7684\u5355\u6676\u7845\u3002\u7845\u6676\u68d2\u5728\u7ecf\u8fc7\u7814\u78e8\uff0c\u629b\u5149\uff0c\u5207\u7247\u540e\uff0c\u5f62\u6210\u7845\u6676\u5706\u7247\uff0c\u4e5f\u5c31\u662f\u6676\u5706<\/li>\n\n\n\n<li>\u63a9\u819c\uff1a<\/li>\n\n\n\n<li>\u5149\u523b\u80f6\uff1a<\/li>\n\n\n\n<li>\u63a5\u89e6\u5f0f\u5149\u523b\uff1a<\/li>\n<\/ul>\n\n\n\n<p>\u8fd9\u5bb6\u516c\u53f8\u73b0\u5728\u7684\u6587\u5316\u662f\u5f88\u6709\u653b\u51fb\u6027\u7684\uff1a\u4e0d\u987e\u4e00\u5207\u5730\u6210\u4e3a\u8d62\u8005\u76f4\u5230\u5784\u65ad\u5e02\u573a\u3002\u8fd9\u79cd\u98a0\u8986\u6027\u7684\u601d\u60f3\u5728ASML\u6210\u7acb\u65f6\u5c31\u6839\u690d\u4e8e\u5176\u6587\u5316\u4e2d\uff0c\u5e76\u5b55\u80b2\u4e86\u540e\u6765\u7684\u4e00\u5207\u3002<\/p>\n\n\n\n<p>\u4e00\u5bb6\u5236\u9020\u8d85\u7ea7\u590d\u6742\u7684\u4ea7\u54c1\u7684\u516c\u53f8\uff0c\u5176\u4f01\u4e1a\u6587\u5316\u5728\u8fc7\u53bb\u6570\u5e74\u4e00\u76f4\u662f\u201c\u70c2\u644a\u5b50\u201d\uff0c\u4f46\u5728\u51e0\u4e2a\u6708\u4e4b\u5185\u5c31\u5f7b\u5e95\u6539\u53d8\u4e86\u5417\uff1f\u751a\u81f3\u57281984\u5e74\u6625\u590f\u4e4b\u4ea4\u65f6\u5efa\u7acb\u7684\u4f01\u4e1a\u6587\u5316\u572830\u5e74\u540e\u4ecd\u65e7\u4fdd\u6301\u4e0d\u53d8\uff1f<\/p>\n\n\n\n<p>\u4eba\u7269<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8d3e\u7279\u00b7\u65af\u5bc6\u7279\uff08Gjalt Smit\uff09\uff1a\n<ul class=\"wp-block-list\">\n<li>ASML\u603b\u67b6\u6784\u5e08<\/li>\n\n\n\n<li>ASML\u7b2c\u4e00\u4efb\u9996\u5e2d\u6267\u884c\u5b98<\/li>\n\n\n\n<li>\u5728ASML\u6210\u7acb\u540e\u7684\u6700\u521d\u51e0\u4e2a\u6708\u5185\u5b9a\u4e49\u516c\u53f8\u7684\u90a3\u4e2a\u4eba<\/li>\n\n\n\n<li>\u4ed6\u5728ASML\u79cd\u4e0b\u4e86\u90a3\u7c92\u79cd\u5b50\u2014\u2014\u4e0d\u8ba1\u6210\u672c\u548c\u95ea\u7535\u822c\u7684\u901f\u5ea6\u3002\u8fd9\u5f15\u5bfc\u7740ASML\u4ece\u4e00\u4e2a\u5fae\u4e0d\u8db3\u9053\u7684\u201c\u5c0f\u73a9\u5bb6\u201d\u6210\u4e3a\u5168\u7403\u7684\u201c\u8d85\u7ea7\u9738\u4e3b\u201d<\/li>\n\n\n\n<li>\u6700\u65e9\u4ece\u98de\u5229\u6d66\u6765\u768450\u540d\u5458\u5de5\u6784\u6210\u4e86ASML\u7684\u6280\u672f\u56e2\u961f\u3002\u5176\u4e2d\u6700\u4e86\u4e0d\u8d77\u7684\u4e8b\u60c5\u662f\u8d3e\u7279\u00b7\u65af\u5bc6\u7279\u628a\u7126\u707c\u6df7\u4e71\u7684\u5458\u5de5\u7ec4\u5efa\u6210\u4e86\u4e00\u652f\u5145\u6ee1\u70ed\u60c5\u7684\u961f\u4f0d\uff0c\u5e76\u4e14\u878d\u5408\u4e86\u5f88\u591a\u622a\u7136\u4e0d\u540c\u7684\u6587\u5316<\/li>\n\n\n\n<li>ASML\u7684\u6545\u4e8b\u8fd8\u5305\u62ec\u6ca1\u6709\u4eba\u60c5\u5473\u7684\u5de5\u4f5c\u6587\u5316\uff1a\u201c18\u4e2a\u8f6e\u5b50\u7684\u5927\u5361\u8f66\u8bbe\u8ba1\u7684\u65f6\u901f\u662f\u6bcf\u5c0f\u65f660\u82f1\u91cc\uff081\u82f1\u91cc\u7ea6\u4e3a1609\u7c73\uff09\u3002\u4f60\u53ef\u4ee5\u5f00\u5230\u6bcf\u5c0f\u65f690\u82f1\u91cc\uff0c\u4f46\u4f60\u4e0d\u80fd\u603b\u5f00\u90a3\u4e48\u5feb\u3002\u5728ASML\uff0c17\u5e74\u65f6\u95f4\u91cc\u6211\u7684\u65f6\u901f\u4e00\u76f4\u662f\u6bcf\u5c0f\u65f690\u82f1\u91cc\u3002\u201d<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u963f\u745f\u00b7\u5fb7\u5c14\u00b7\u666e\u62c9\u591a\uff08Arthur del Prado\uff09\n<ul class=\"wp-block-list\">\n<li>ASML\u5927\u80a1\u4e1c\uff0c\u4e0e\u65bd\u5bc6\u7279\u4e0d\u548c<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u5f17\u91cc\u8328\u00b7\u514b\u6d1b\u65af\u7279\u66fc(Frits Klostermann)\n<ul class=\"wp-block-list\">\n<li>Natlab\u7684\u7814\u53d1\u4eba\u5458\u3001\u79d1\u5b66\u5bb6\uff0c\u4e3b\u5bfc\u9020\u51fa\u4e86\u98de\u5229\u6d66\u96c6\u56e2\u7b2c\u4e00\u53f0\u5149\u523b\u673a-6\u955c\u5934\u91cd\u590d\u66dd\u5149\u5149\u523b\u673a<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u91cc\u5965\u00b7\u56fe\u83ab\u65af\uff08Leo Tummers\uff09\uff1a\n<ul class=\"wp-block-list\">\n<li>\u514b\u6d1b\u65af\u7279\u66fc\u7684\u9886\u5bfc<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u7231\u5fb7\u00b7\u9c8d\u5c14\uff08Ad Bouwer\uff09\uff1a\n<ul class=\"wp-block-list\">\n<li>\u514b\u6d1b\u65af\u7279\u66fc\u5728\u7814\u53d1\u98de\u5229\u6d66\u96c6\u56e2\u7b2c\u4e00\u53f0\u5149\u523b\u673a\u7684\u65f6\u5019\u62db\u52df\u7684\u8bbe\u8ba1\u5e08<\/li>\n\n\n\n<li>\u6b64\u4eba\u56fa\u6267\u4e14\u6267\u7740\uff0c\u4e24\u4eba\u7ecf\u5e38\u4e89\u8bba\u4e0d\u4f11\uff0c\u4f46\u4ed6\u5728\u6574\u4e2a\u8fc7\u7a0b\u4e2d\u53d1\u6325\u4e86\u5de8\u5927\u4f5c\u7528<\/li>\n\n\n\n<li>\u4ed6\u88ab\u8ba4\u4e3a\u662fNatlab\u5f53\u65f6\u6700\u597d\u7684\u673a\u68b0\u5de5\u7a0b\u5e08\uff0c\u751a\u81f3\u53ef\u80fd\u662f\u6574\u4e2a\u98de\u5229\u6d66\u6700\u597d\u7684\u673a\u68b0\u5de5\u7a0b\u5e08\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u5b89\u4e1c\u00b7\u98de\u5229\u6d66\uff08Anton Philips\uff09\uff1a\u98de\u5229\u6d66\u7684\u521b\u59cb\u4eba<\/li>\n\n\n\n<li>\u5f17\u91cc\u8328\u00b7\u98de\u5229\u6d66\uff08Frits Philips\uff09\uff1a\u5b89\u4e1c\u7684\u513f\u5b50\uff0c\u5728\u5b89\u4e1c\u4e4b\u540e\u63a5\u7ba1\u4e86\u8be5\u516c\u53f8<\/li>\n\n\n\n<li>\u54c8\u970d\u00b7\u6885\u8036\uff08Hajo Meyer\uff09\uff1aNatlab\u7684\u90e8\u95e8\u8d1f\u8d23\u4eba\u4e4b\u4e00<\/li>\n\n\n\n<li>\u8d6b\u5c14\u66fc\u00b7\u8303\u5e0c\u514b\uff08Herman van Heek\uff09\u548c\u5409\u65af\u00b7\u5e03\u4f11\u65af\uff08Gijs Bouwhuis\uff09\uff1a\n<ul class=\"wp-block-list\">\n<li>\u8054\u5408\u521b\u9020\u4e86\u4e16\u754c\u4e0a\u7b2c\u4e00\u53f0\u6b65\u8fdb\u5149\u523b\u673a<\/li>\n\n\n\n<li>\u8303\u5e0c\u514b\u662f\u7cfb\u7edf\u67b6\u6784\u5e08\uff0c\u5e03\u4f11\u65af\u5219\u7814\u53d1\u4e86\u4e00\u79cd\u7cbe\u786e\u5ea6\u6700\u9ad8\u7684\u5bf9\u51c6\u6280\u672f<\/li>\n\n\n\n<li>\u5728\u968f\u540e\u7684\u51e0\u5341\u5e74\u91cc\uff0c\u8377\u5170\u7684\u5149\u523b\u6280\u672f\u4f20\u904d\u4e86\u5168\u7403<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u7ef4\u59c6\u00b7\u7279\u7f57\u65af\u7279\uff08Wim Troost\uff09\uff1a\n<ul class=\"wp-block-list\">\n<li>1970s\uff0c\u4ece\u5e9f\u6599\u5806\u4e2d\u6551\u51fa\u4e86\u6b65\u8fdb\u5149\u523b\u673a<\/li>\n\n\n\n<li>\u4ed6\u662fS&amp;I\u7684\u4e8b\u4e1a\u90e8\u8463\u4e8b\u4e4b\u4e00\uff0c\u5728\u98de\u5229\u6d66\u6b65\u8fdb\u5149\u523b\u673a\u7684\u53d1\u5c55\u5386\u53f2\u4e2d\u53d1\u6325\u5173\u952e\u4f5c\u7528<\/li>\n\n\n\n<li>\u5982\u679c\u8bf4\u5728\u540e\u6765\u7684\u51e0\u5341\u5e74\u91cc\uff0c\u6709\u4eba\u53ef\u4ee5\u4ee3\u8868\u98de\u5229\u6d66\uff0c\u90a3\u4e48\u8fd9\u4e2a\u4eba\u5c31\u662f\u4ed6<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u963f\u745f\u00b7\u5fb7\u5c14\u00b7\u666e\u62c9\u591a\n<ul class=\"wp-block-list\">\n<li>ASML\u7684\u524d\u8eabASM\u7684\u521b\u59cb\u4eba<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p>ASML<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>30\u591a\u5e74\u524d\uff0c\u6574\u4e2a\u5149\u523b\u673a\u5e02\u573a\u88ab\u7f8e\u56fdGCA\u548c\u5c3c\u5eb7\u5784\u65ad<\/li>\n\n\n\n<li>\u4ed6\u4eec\u82b1\u4e8610\u5e74\u65f6\u95f4\u4f7f\u516c\u53f8\u7ad9\u5728\u7ade\u4e89\u8005\u7684\u524d\u9762<\/li>\n\n\n\n<li>\u4ece20\u4e16\u7eaa90\u5e74\u4ee3\u4e2d\u671f\u5f00\u59cb\uff0c\u4ed6\u4eec\u53c8\u82b1\u4e8610\u5e74\u65f6\u95f4\u6700\u7ec8\u5b8c\u5168\u5784\u65ad\u4e86\u5e02\u573a\u3002<\/li>\n\n\n\n<li>\u5728\u7b2c\u4e09\u4e2a10\u5e74\u540e\u7684\u4eca\u5929\uff0cASML\u7684\u5149\u523b\u673a\u5728\u82af\u7247\u7cbe\u5ea6\u548c\u5236\u9020\u901f\u5ea6\u4e0a\u5df2\u7ecf\u85d0\u89c6\u7fa4\u96c4<\/li>\n\n\n\n<li>\u8377\u5170\u6700\u5927\u7684\u51fa\u53e3\u5546\u3001\u8377\u5170\u6700\u5927\u7684\u6280\u672f\u96c7\u4e3b\u548c\u4e16\u754c\u6700\u5927\u7684\u82af\u7247\u8bbe\u5907\u5236\u9020\u5546<\/li>\n\n\n\n<li>ASML\u5149\u523b\u673a\u5360\u636e\u7684\u5e02\u573a\u4efd\u989d\u670970%\uff5e80%\u4e4b\u9ad8\uff0c\u5f88\u591a\u5e74\u91cc\u4e00\u76f4\u628a\u4f73\u80fd\u548c\u5c3c\u5eb7\u8fdc\u8fdc\u7529\u5728\u540e\u9762<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">1.\u5149\u523b\u673a\u524d\u5386\u53f2(1962-1969)<\/h1>\n\n\n\n<p>\u98de\u5229\u6d66\u7269\u7406\u5b9e\u9a8c\u5ba4\uff08Natlab\uff09\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u4e00\u4e2a\u53ea\u63a5\u6536\u9876\u5c16\u4eba\u624d\u7684\u8d85\u7ea7\u5927\u5b66\uff0c\u4e0d\u9700\u8981\u50cf\u5927\u5b66\u91cc\u90a3\u6837\u4e0a\u8bfe\uff0c\u79d1\u7814\u9884\u7b97\u51e0\u4e4e\u6ca1\u6709\u4e0a\u9650<\/li>\n\n\n\n<li>\u98de\u5229\u6d66\u521b\u65b0\u4e4b\u6e90\uff0c\u4f7f\u5f97\u5f88\u591a\u5148\u8fdb\u79d1\u6280\u8f6c\u5316\u6210\u4e86\u65b0\u4ea7\u54c1\uff1a\u7535\u89c6\u3001\u6536\u97f3\u673a\u3001\u65e5\u5149\u706f\u3001\u5f55\u50cf\u673a<\/li>\n<\/ul>\n\n\n\n<p>1961\u5e74\uff1a\u7f8e\u56fdGCA\u7684David Mann\u516c\u53f8\u63a8\u51fa\u4e86971\u578bPhoto repeater\uff08\u91cd\u590d\u66dd\u5149\u5149\u523b\u673a\uff09\uff0c\u4e3a\u6700\u65e9\u7684\u5149\u523b\u673a\uff0c\u7b2c\u4e8c\u5e74\u5c31\u5356\u4e8623\u53f0\uff1b\u5168\u624b\u52a8\u64cd\u4f5c\uff0c\u66dd\u5149\u7cbe\u5ea6\u4e3a1\u5fae\u7c73\uff08\u5176\u4ed6\u4eea\u5668\u7684\u7cbe\u5ea6\u53ea\u80fd\u8fbe\u523025\u5fae\u7c73\uff09\uff0c\u63a5\u89e6\u5f0f\u63a9\u819c\u3001\u6c19\u6c14\u95ea\u5149\u706f\u3001\u7f29\u5370\u7167\u76f8\uff1b\u5728\u6574\u4e2a1960s\uff0c\u8be5\u516c\u53f8\u7684\u5e02\u573a\u4efd\u989d\u4e00\u76f4\u4fdd\u6301\u572860%~70%\uff0c\u4ee5\u4ea7\u54c1\u54c1\u8d28\u5353\u8d8a\u95fb\u540d\uff0c\u4e0d\u4ec5\u81ea\u8eab\u54c1\u63a7\u6781\u9ad8\uff0c\u5bf9\u4f9b\u5e94\u5546\u4e5f\u5f88\u82db\u523b\u3002<\/p>\n\n\n\n<p>1963\u5e74\uff1a\u98de\u5229\u6d66\u7684\u534a\u5bfc\u4f53\u548c\u6750\u6599\u90e8Elcoma\u8d2d\u4e70\u4e86\u4e00\u53f0971\u578b\u5149\u523b\u673a\uff0cNatlab\u7684\u7814\u53d1\u4eba\u5458-\u79d1\u5b66\u5bb6\u5f17\u91cc\u8328\u00b7\u514b\u6d1b\u65af\u7279\u66fc(Frits Klostermann)-\u4ed4\u7ec6\u6d4b\u8bd5\u4e86\u8fd9\u53f0\u673a\u5668\uff0c\u8ba4\u4e3a\u4ed6\u4eec\u7684\u7cfb\u7edf\u5176\u5b9e\u6ca1\u6709\u505a\u5230\u8db3\u591f\u597d\u3002<\/p>\n\n\n\n<p>1960s\uff1aElcoma\u7684\u534a\u5bfc\u4f53\u5de5\u5382\u51b3\u5b9a\u5f00\u59cb\u751f\u4ea7\u96c6\u6210\u7535\u8def\uff0c\u4ed6\u4eec\u4ece\u7f8e\u56fd\u8ba2\u8d2d\u7684971\u578b\u5149\u523b\u673a\u5df2\u7ecf\u4e0d\u80fd\u6ee1\u8db3\u9700\u6c42\uff1a\u4e00\u662f\u7cbe\u5ea6\u4e0d\u591f\uff0c\u4e8c\u662f\u592a\u8017\u8d39\u4eba\u529b\u4e86\uff08\u56e0\u4e3a\u9700\u8981\u5168\u624b\u52a8\u64cd\u4f5c\uff09\uff0cElcoma\u548cNatlab\u51b3\u5b9a\u5408\u4f5c\u5236\u9020\u4e00\u53f0\u5149\u523b\u673a<\/p>\n\n\n\n<p>1966\u5e74\uff1a\u514b\u6d1b\u65af\u7279\u66fc\u83b7\u6279\u5236\u9020\u4ed6\u7684\u5149\u523b\u673a\uff0c\u8001\u677f\u7ed9\u4e86\u4ed6\u7edd\u5bf9\u7684\u81ea\u7531\u548c\u6177\u6168\u7684\u9884\u7b97\uff0c\u4ed6\u51b3\u5fc3\u5236\u9020\u51fa\u4e00\u53f0\u5b8c\u7f8e\u7684\u5149\u523b\u673a\uff0c\u8d76\u8d85\u7f8e\u56fd\u3002<\/p>\n\n\n\n<p>\u4ed6\u8981\u89e3\u51b3\u7684\u95ee\u9898\u662f\uff1a\u5982\u4f55\u628a\u96c6\u6210\u7535\u8def\u7684\u56fe\u6848\u6295\u5c04\u5230\u7167\u76f8\u5e95\u7247\u4e0a\uff0c\u7136\u540e\u901a\u8fc7\u63a5\u89e6\u5f0f\u63a9\u6a21\u5c06\u7167\u76f8\u5e95\u7247\u4e0a\u7684\u56fe\u6848\u523b\u5230\u82af\u7247\u4e0a\u3002\u4ed6\u53c2\u8003\u4e86David Mann\u516c\u53f8\u7684\u65b9\u6848\uff0c\u8bbe\u8ba1\u4e86\u4e00\u4e2a6\u955c\u5934\u66dd\u5149\u7cfb\u7edf\uff0c\u53ef\u4e3a\u5355\u4e2a\u82af\u7247\u540c\u65f6\u66dd\u51496\u4e2a\u4e0d\u540c\u7684\u7167\u76f8\u5e95\u7247\uff0c\u6bcf\u4e2a\u5e95\u7247\u6709\u4e0d\u540c\u7684\u56fe\u6848\uff0c\u6210\u4e3a\u82af\u7247\u4e2d\u7684\u4e00\u5c42\u3002<\/p>\n\n\n\n<p>\u7814\u53d1\u7684\u8fc7\u7a0b\u4e2d\u5fc5\u7136\u4f1a\u9047\u5230\u4e00\u4e9b\u6280\u672f\u95ee\u9898\uff0c\u6765\u81eaNatlab\u7684\u6280\u672f\u4e3a\u5176\u63d0\u4f9b\u4e86\u91cd\u8981\u652f\u6301\uff0c\u65e2\u4e09\u5f20\u7cbe\u5bc6\u6280\u672f\u738b\u724c\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7ebf\u6027\u5149\u6805\u6280\u672f\uff1a\u4e00\u4e2a\u5149\u7535\u6807\u5c3a\u53ef\u4ee5\u6d4b\u91cf\u51fa0.1\u5fae\u7c73\u7684\u4f4d\u79fb\uff0c\u901a\u8fc7\u8be5\u6280\u672f\u6d4b\u91cf\u7684\u6570\u636e\uff0c\u65b0\u5149\u523b\u673a\u53ef\u4ee5\u7cbe\u51c6\u5730\u8fdb\u884c\u95ea\u5149\u706f\u66dd\u5149\u3002<\/li>\n\n\n\n<li>\u6db2\u538b\u8f74\u627f\u6280\u672f\uff1a\u53ef\u7528\u4e8e\u5236\u9020\u4e00\u4e2a\u7ebf\u6027\u6ed1\u52a8\u7cfb\u7edf\uff0c\u5185\u90e8\u91d1\u5c5e\u90e8\u4ef6\u6f02\u6d6e\u5728\u53d7\u538b\u6052\u5b9a\u7684\u6cb9\u819c\u4e0a\uff0c\u79fb\u52a8\u65f6\u6ca1\u6709\u6469\u64e6\uff0c\u56e0\u6b64\u6574\u4e2a\u88c5\u7f6e\u6ca1\u6709\u78e8\u635f\u3002<\/li>\n\n\n\n<li>\u7a7a\u6c14\u8f74\u627f\u6280\u672f\uff1a\u53ef\u8ba96\u4e2a\u955c\u5934\u50cf6\u4e2a\u6c14\u57ab\u8239\u4e00\u6837\u5728\u538b\u7f29\u7a7a\u6c14\u4e2d\u72ec\u7acb\u6f02\u6d6e\uff0c\u4f7f\u5f97\u955c\u5934\u548c\u7167\u76f8\u5e95\u7247\u4e4b\u95f4\u7684\u8ddd\u79bb\u53ef\u88ab\u7cbe\u786e\u63a7\u5236\uff0c\u53ef\u7cbe\u786e\u52301\u5fae\u7c73\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u6700\u7ec8\u6210\u54c1\u7684\u6027\u80fd\u4e5f\u975e\u5e38\u5353\u8d8a\uff1a6\u4e2a\u5149\u63a9\u6a21\u7684\u56fe\u6848\u504f\u5dee\uff08\u56de\u5f52\u8bef\u5dee\uff09\u5728\u6574\u4e2a\u8868\u9762\u4fdd\u6301\u57280.1\u5fae\u7c73\u4ee5\u5185\u3002\u5bf9\u4e8e\u8fde\u7eed\u6210\u50cf\u7684\u5149\u63a9\u6a21\uff0c\u53ef\u4ee5\u8fbe\u5230\u572830\u6beb\u7c73\u7684\u957f\u5ea6\u5185\u5bf9\u51c6\u8bef\u5dee\u53ea\u67090.25\u5fae\u7c73\u3002\u5728\u8ddd\u79bb\u4e2d\u5fc31.6\u6beb\u7c73\u7684\u76f4\u5f84\u8303\u56f4\u5185\uff0c\u8be5\u5149\u523b\u673a\u751a\u81f3\u53ef\u4ee5\u523b\u51fa1\u5fae\u7c73\u5bbd\u7684\u7cbe\u7ec6\u7ebf\u6761\u3002\u8fd9\u4e9b\u5728\u5f53\u65f6\u90fd\u662f\u4ee4\u4eba\u5370\u8c61\u6df1\u523b\u7684\u6570\u5b57\u3002<\/p>\n\n\n\n<p>1967\u5e745\u6708\uff1a\u514b\u6d1b\u65af\u7279\u66fc\u548c\u9c8d\u5c14\u76846\u955c\u5934\u91cd\u590d\u66dd\u5149\u5149\u523b\u673a\u539f\u578b\u5728Natlab\u7814\u7a76\u5c55\u89c8\u4e0a\u5c55\u51fa\u3002<\/p>\n\n\n\n<p>1967\u5e74\u590f\uff1aNatlab\u4f7f\u7528\u4ed6\u4eec\u76846\u955c\u5934\u88c5\u7f6e\u5236\u4f5c\u7684\u7b2c\u4e00\u5f20\u63a9\u819c\u4ea4\u4ed8Elcoma\u6676\u5706\u5382\u3002\u4e00\u4e2a\u6708\u540e\uff0cNatlab\u5f00\u59cb\u5236\u9020\u7b2c\u4e8c\u53f0\u8fd9\u6837\u7684\u673a\u5668\uff0c\u622a\u6b621968\u5e741\u6708\u5219\u8fbe\u5230\u4e866\u53f0\u3002<\/p>\n\n\n\n<p>\u4e0eDavid Mann\u516c\u53f8\u7684\u5149\u523b\u673a\u76f8\u6bd4\uff0cNatlab\u7684\u5149\u523b\u673a\u4e0d\u5b58\u5728\u6e29\u5ea6\u5f62\u53d8\u95ee\u9898\uff0c\u6210\u54c1\u826f\u7387\u8f83\u9ad8\uff0c\u901f\u5ea6\u4e5f\u5f88\u4e0d\u9519\uff0c\u5728\u5f53\u65f6\u5341\u5206\u5148\u8fdb\u3002\u98de\u5229\u6d66\u4e3b\u8981\u7528\u5b83\u4e3a\u96c6\u56e2\u5185\u7684\u516c\u53f8\u5236\u9020\u63a9\u819c\uff0c\u540e\u6765\u4e5f\u5bf9\u82f1\u56fd\u548c\u7f8e\u56fd\u9500\u552e\u63a9\u819c\u3002\u91cd\u590d\u66dd\u5149\u5149\u523b\u673a\u6210\u4e86\u98de\u5229\u6d66\u7684\u62f3\u5934\u4ea7\u54c1\u3002<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">2.\u5408\u6cd5\u5370\u949e\u673a(1970-1975)<\/h1>\n\n\n\n<p>\u8be5\u9636\u6bb5\u7684\u5173\u952e\u4eba\u7269\u662f\u8d6b\u5c14\u66fc\u00b7\u8303\u5e0c\u514b\uff08Herman van Heek\uff09\u548c\u5409\u65af\u00b7\u5e03\u4f11\u65af\uff08Gijs Bouwhuis\uff09\uff0c\u8fd9\u4e24\u4e2a\u4eba\u662f\u5929\u751f\u7684\u5de5\u7a0b\u5e08\u3002\u4ed6\u4eec\u8054\u624b\u521b\u9020\u4e86\u4e16\u754c\u4e0a\u7b2c\u4e00\u53f0\u6b65\u8fdb\u5149\u523b\u673a\u3002\u8303\u5e0c\u514b\u662f\u7cfb\u7edf\u67b6\u6784\u5e08\uff0c\u5e03\u4f11\u65af\u5219\u7814\u53d1\u4e86\u4e00\u79cd\u7cbe\u786e\u5ea6\u6700\u9ad8\u7684\u5bf9\u51c6\u6280\u672f\u3002\u5728\u968f\u540e\u7684\u51e0\u5341\u5e74\u91cc\uff0c\u8377\u5170\u7684\u5149\u523b\u6280\u672f\u4f20\u904d\u4e86\u5168\u7403\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.1 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class=\"wp-block-heading\">2.3 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Repeater1\u6216SiRe1\uff09\u3002<\/p>\n\n\n\n<p>\u4ed6\u4eec\u662f\u5982\u4f55\u89e3\u51b3\u6700\u68d8\u624b\u7684\u5bf9\u51c6\u95ee\u9898\u7684\u5462\uff1f\u90a3\u5c31\u662f\u76f8\u4f4d\u5149\u6805\u548c\u955c\u540e\u6d4b\u5149\u3002<\/p>\n\n\n\n<p>\u76f8\u4f4d\u5149\u6805\uff1a\u5f53\u65f6\u51e0\u4e4e\u6240\u6709\u4e3b\u8981\u82af\u7247\u5236\u9020\u5546\u90fd\u5728\u7814\u7a76\u5229\u7528\u6676\u5706\u4e0a\u67d0\u79cd\u9c9c\u660e\u7684\u7279\u5f81\u6765\u786e\u5b9a\u4f4d\u7f6e\uff0c\u5e03\u4f11\u65af\u63d0\u51fa\u4e86\u53ef\u5c06\u76f8\u4f4d\u5149\u6805\u7528\u4e8e\u4f4d\u79fb\u6d4b\u91cf\u6280\u672f\u3002\u76f8\u4f4d\u5149\u6805\u770b\u8d77\u6765\u6709\u70b9\u50cf\u82a6\u7b0b\u7530\uff0c\u4f20\u611f\u5668\u4f7f\u7528\u5149\u5b66\u504f\u632f\u548c\u76f8\u4f4d\u5bf9\u6bd4\u6280\u672f\uff0c\u8fd9\u4f7f\u5f97\u5b83\u53ef\u4ee5\u8bfb\u53d6\u8fd9\u4e9b\u82a6\u7b0b\u7530\uff0c\u5982\u679c\u4ed6\u4eec\u80fd\u628a\u4e00\u4e2a\u5c0f\u578b\u82a6\u7b0b\u7530\u653e\u5728\u6676\u5706\u4e0a\uff0c\u5e76\u5c06\u63a9\u6a21\u548c\u5176\u4ed6\u4e1c\u897f\u90fd\u7528\u504f\u632f\u6fc0\u5149\u5bf9\u51c6\uff0c\u90a3\u4e48\u7406\u8bba\u4e0a\u53ef\u4ee5\u89e3\u51b3\u5bf9\u51c6\u7684\u95ee\u9898\u3002<\/p>\n\n\n\n<p>\u955c\u540e\u6d4b\u5149\uff1a\u8ba9\u5b9a\u4f4d\u6fc0\u5149\u76f4\u63a5\u7a7f\u8fc7\u955c\u5934\u7ec4\u800c\u4e0d\u662f\u5355\u72ec\u7684\u955c\u5934\u5bf9\u5149\u8def\u8fdb\u884c\u6295\u5f71\u548c\u5bf9\u51c6\u3002\u591a\u955c\u5934\u7cfb\u7edf\u4f1a\u5e26\u6765\u65b0\u7684\u6311\u6218\uff0c\u4f46\u88ab\u5e03\u4f11\u65af\u5b8c\u7f8e\u89e3\u51b3\u3002\u955c\u540e\u6d4b\u5149\u6280\u672f\u662f\u7687\u51a0\u4e0a\u7684\u660e\u73e0\uff0c\u540e\u6765\u7531\u98de\u5229\u6d66\u4e0eASM\u56fd\u9645\u516c\u53f8\u7684\u5408\u8d44\u516c\u53f8\u2014\u2014ASML\u7ee7\u627f\u3002<\/p>\n\n\n\n<p>\u76f8\u4f4d\u5149\u6805\u548c\u955c\u540e\u6d4b\u5149\u6280\u672f\u7684\u7ed3\u5408\u6781\u5177\u9769\u547d\u6027\u548c\u5148\u8fdb\u6027\uff0c\u5b83\u4f7fASML\u5728\u672a\u6765\u51e0\u5341\u5e74\u7684\u7ade\u4e89\u4e2d\u4e00\u76f4\u9886\u5148\u3002\u8fd9\u79cd\u7ed3\u5408\u548c\u76f4\u7ebf\u7535\u52a8\u673a\uff08\u540e\u6765\u5728Natlab\u5b9e\u73b0\uff09\u4e00\u8d77\u6784\u6210\u4e86ASML\u6210\u529f\u7684\u6280\u672f\u57fa\u7840\u3002\u5b83\u662f\u4e00\u9879\u5173\u952e\u7684\u53d1\u660e\uff0c\u5c06\u4f7fASML\u5f81\u670d\u5168\u7403\u5e02\u573a\uff0c\u5e76\u6210\u957f\u4e3a2000\u5e74\u540e\u82af\u7247\u5149\u523b\u5de5\u827a\u7684\u4e3b\u8981\u4f9b\u5e94\u5546\u3002<\/p>\n\n\n\n<p>\u6295\u5f71\u7cfb\u7edf\u5e76\u4e0d\u662f\u8303\u5e0c\u514b\u548c\u5e03\u4f11\u65af\u6240\u9762\u4e34\u7684\u552f\u4e00\u5149\u5b66\u6311\u6218\uff0c\u8fd9\u4e00\u8fc7\u7a0b\u8fd8\u6d89\u53ca\u5927\u91cf\u7684\u64cd\u4f5c\u548c\u5feb\u901f\u7cbe\u51c6\u7684\u79fb\u52a8\u3002\u4e3a\u4e86\u5feb\u901f\u5236\u9020\u4e00\u53f0\u539f\u578b\u673a\uff0c\u8303\u5e0c\u514b\u627e\u6765\u4e86\u9c8d\u5c14\u3002\u5f53\u65f6\uff0c\u9c8d\u5c14\u88ab\u8ba4\u4e3a\u662fNatlab\u8fc4\u4eca\u4e3a\u6b62\u6700\u597d\u7684\u673a\u68b0\u5de5\u7a0b\u5e08\uff0c\u751a\u81f3\u53ef\u80fd\u662f\u6574\u4e2a\u98de\u5229\u6d66\u6700\u597d\u7684\u673a\u68b0\u5de5\u7a0b\u5e08\u3002\u9c8d\u5c14\u548cNatlab\u7684\u6c14\u52a8\u5c0f\u7ec4\u6709\u7740\u826f\u597d\u7684\u5173\u7cfb\uff0c\u56e0\u6b64\u91c7\u7528\u4e86\u538b\u7f29\u7a7a\u6c14\u65b9\u6848\u6765\u5b9e\u73b0\u79fb\u52a8\u3002<\/p>\n\n\n\n<p>\u4e3a\u4e86\u987a\u5229\u5236\u9020\u8fd9\u53f0\u539f\u578b\u673a\uff0c\u4ed6\u4eec\u8fd8\u5f97\u5230\u4e86\u5176\u4ed6\u90e8\u95e8\u7684\u5e2e\u52a9\uff0c\u6bd4\u5982Elcoma\u63d0\u4f9b\u4e86\u673a\u5668\u63a7\u5236\u7cfb\u7edf\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u4f4d\u4e8e\u6cd5\u56fd\u7684CERCO\u514b\u670d\u5de8\u5927\u6311\u6218\u63d0\u4f9b\u4e86\u6ee1\u8db3\u4ed6\u4eec\u82db\u523b\u8981\u6c42\u7684\u5149\u5b66\u5668\u4ef6\u3002<\/p>\n\n\n\n<p>\u6700\u7ec8\u7684\u6210\u54c1\u662f\u9886\u5148\u7684\uff1a\u8fd9\u53f0\u673a\u5668\u5c06\u63a9\u6a21\u56fe\u6848\u7f29\u5c0f\u81f32\u82f1\u5bf8\u89c1\u65b9\uff0c\u5e76\u5c06\u56fe\u6848\u6295\u5c04\u5728\u76f4\u5f84\u53ea\u6709\u4e09\u56db\u82f1\u5bf8\u7684\u6676\u5706\u4e0a\u3002\u7535\u8def\u4e2d\u6700\u5c0f\u7684\u56fe\u6848\u53ea\u67092\u5fae\u7c73\u5bbd\u3002\u5728\u6700\u5927\u7684\u9510\u5ea6\u4e0b\uff0c\u6bcf\u6b21\u6b65\u8fdb\u53ef\u4ee5\u6210\u50cf7\u6beb\u7c73\u89c1\u65b9\u7684\u82af\u7247\u3002\u5b83\u8fd8\u53ef\u4ee5\u6210\u50cf\u66f4\u5927\u7684\u82af\u7247\uff0810\u6beb\u7c73\u00d710\u6beb\u7c73\uff09\uff0c\u4f46\u6295\u5f71\u540e\u7684\u56fe\u50cf\u4e0d\u591f\u9510\u5229\u3002\u6b65\u8fdb\u5149\u523b\u673a\u53ef\u4ee5\u57281\/10\u5fae\u7c73\u7684\u8bef\u5dee\u8303\u56f4\u5185\u5b9a\u4f4d\u6676\u5706\u3002\u66dd\u5149\u9700\u89810.5\u79d2\uff0c\u79fb\u52a8\u4f4d\u7f6e\u540e\u518d\u6295\u5f71\u53c8\u9700\u89810.5\u79d2\u3002\u57283\u5206\u949f\u5185\uff0c\u673a\u5668\u5c31\u80fd\u66dd\u5149\u6574\u4e2a\u6676\u5706\u3002\u4e16\u754c\u4e0a\u6ca1\u6709\u4ec0\u4e48\u6bd4\u8fd9\u66f4\u5148\u8fdb\u4e86\u3002<\/p>\n\n\n\n<p>\u4f46\u5b83\u4ecd\u7136\u53e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class=\"wp-block-heading\">2.3 \u7f8e\u56fd\u4ea7\u54c1<\/h2>\n\n\n\n<p>Perkin-Elmer\u7684Micralign\u5149\u523b\u673a\uff1aPerkin-Elmer\u7684\u5de5\u7a0b\u5e08\u57fa\u4e8e\u4e3a\u7f8e\u56fd\u7a7a\u519b\u5236\u9020\u7684\u5fae\u578b\u6295\u5f71\u4eea\u8fdb\u884c\u6539\u8fdb\uff0c\u8fd9\u79cd\u6295\u5f71\u4eea\u4ecd\u7136\u662f1:1\u6295\u5f71\u800c\u4e0d\u662f\u5fae\u7f29\u6295\u5f71\uff0c\u4f46\u89e3\u51b3\u4e86\u63a5\u89e6\u5f0f\u5149\u523b\u673a\u7684\u63a9\u819c\u6d6a\u8d39\u95ee\u9898\u3002\u4ed6\u4eec\u6539\u8fdb\u4e86\u66dd\u5149\u7cfb\u7edf\uff0c\u91c7\u7528\u4e24\u4e2a\u51f9\u9762\u7684\u7403\u5f62\u955c\uff0c\u89e3\u51b3\u4e86\u5149\u7684\u6563\u5c04\u95ee\u9898\uff0c\u4ee5\u53ca\u7403\u5f62\u7578\u53d8\u95ee\u9898\uff0c\u6700\u7ec8\u4f7f\u5f97\u6574\u4e2a\u66dd\u5149\u7cfb\u7edf\u5927\u5927\u7b80\u5316\u30021971\u5e7411\u6708\uff0cPerkin-Elmer\u5c06\u8fd9\u53f0\u673a\u5668\u5236\u9020\u4e86\u51fa\u6765\uff0c\u547d\u540d\u4e3aMicralign\u5149\u523b\u673a\u3002<\/p>\n\n\n\n<p>Micralign\u5149\u523b\u673a\u9010\u6e10\u88ab\u82af\u7247\u5236\u9020\u5546\u8ba4\u53ef\uff0c\u56e0\u4e3a\u5b83\u4f7f\u5f97\u63a9\u819c\u53ef\u4ee5\u65e0\u9650\u4f7f\u7528\uff0c\u5e76\u4e14\u80fd\u5927\u5e45\u63d0\u9ad8\u82af\u7247\u826f\u7387\uff0c\u4f7f\u5f97\u82af\u7247\u5236\u9020\u6210\u672c\u5927\u5e45\u964d\u4f4e\u3002\u5176\u4e2dIntel\u8fd8\u4f7f\u7528\u5b83\u5236\u9020\u51fa\u4e86\u5927\u540d\u9f0e\u9f0e\u76848086\u5904\u7406\u5668\uff081978\u5e746\u6708\uff09\uff0c\u4e00\u5e74\u540e\u53c8\u5236\u9020\u51fa\u4e868088\u5904\u7406\u5668\uff0cIntel\u540e\u6765\u7528\u8fd9\u4e2a\u5904\u7406\u5668\u5236\u9020\u51fa\u4e86\u7b2c\u4e00\u53f0\u4e2a\u4eba\u8ba1\u7b97\u673a\u3002<\/p>\n\n\n\n<p>1970s\uff0cPerkin-Elmer\u6210\u4e3a\u4e00\u5bb6\u5236\u9020\u82af\u7247\u8bbe\u5907\u7684\u5927\u5de5\u5382\u3002\u5b83\u62e5\u670990%\u7684\u5149\u523b\u5e02\u573a\u4efd\u989d\uff0c\u662f\u534a\u5bfc\u4f53\u884c\u4e1a\u6700\u5927\u7684\u8bbe\u5907\u4f9b\u5e94\u5546\u3002\u5bf9\u4e8e\u82af\u7247\u5236\u9020\u5546\u6765\u8bf4\uff0cMicralign\u5149\u523b\u673a\u582a\u79f0\u5b8c\u7f8e\u3002\u81ea20\u4e16\u7eaa70\u5e74\u4ee3\u4e2d\u671f\u4ee5\u540e\uff0cNatlab\u548c\u8bb8\u591a\u7f8e\u56fd\u82af\u7247\u516c\u53f8\u5728\u6b65\u8fdb\u5149\u523b\u673a\u7684\u5f00\u53d1\u4e2d\u4e00\u76f4\u5904\u4e8e\u843d\u540e\u5730\u4f4d\u3002<\/p>\n\n\n\n<p>David Mann\u7684\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\uff1aMicralign\u7684\u706b\u7206\u4f7f\u5f97\u4ed6\u4eec\u7684\u5149\u523b\u673a\u6ca1\u4e86\u9500\u8def\uff0c\u4ed6\u4eec\u51b3\u5b9a\u4fee\u6539\u4ed6\u4eec\u7684\u5149\u523b\u673a\u6a21\u578b\uff0c\u628a\u5b83\u53d8\u6210\u4e00\u53f0\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\u3002David Mann\u7684\u9ad8\u7ba1\u4e0d\u652f\u6301\u8fd9\u4e00\u89c2\u70b9\uff0c\u4f46\u56e2\u961f\u6709\u5f88\u5927\u7684\u81ea\u4e3b\u6743\uff0c\u575a\u6301\u8d70\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\u8def\u7ebf\u3002David Mann\u5728\u7814\u53d1\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\u7684\u65f6\u5019\uff0c\u98de\u5229\u6d66\u4e5f\u5728\u7814\u53d1\uff0c\u98de\u5229\u6d66\u56e0\u5176\u6280\u672f\u95fb\u540d\uff0c\u4ed6\u4eec\u66fe\u5411\u98de\u5229\u6d66\u5bfb\u6c42\u8fc7\u5408\u4f5c\uff0c\u4f46\u5f97\u5230\u4e86\u62d2\u7edd\u3002<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">3.\u5782\u6b7b\u6323\u624e(1976-1983)<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">3.1 \u7ef4\u59c6\u00b7\u7279\u7f57\u65af\u7279<\/h2>\n\n\n\n<p>1978\u5e74\u521d\uff0cPerkin-Elmer\u7684Micralign\u5149\u523b\u673a\u6b63\u5728\u8fc5\u901f\u5360\u9886\u5e02\u573a\u3002Natlab\u548c\u98de\u5229\u6d66\u7684\u6676\u5706\u5382\u90fd\u8d2d\u4e70\u4e86\u8fd9\u79cd\u673a\u5668\u3002\u770b\u5230\u5546\u673a\u7684\u98de\u5229\u6d66\u9ad8\u7ba1\u4eec\u60f3\u8981\u7ee7\u7eed\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\u7814\u7a76\u8ba1\u5212\uff0c\u76f8\u5173\u7684\u4e24\u4e2a\u90e8\u95e8\u662fNatlab\u548c\u98de\u5229\u6d66\u79d1\u5b66\u4e0e\u5de5\u4e1a\u90e8\uff08S&amp;I\uff09\uff0c\u524d\u8005\u504f\u7814\u7a76\uff0c\u540e\u8005\u504f\u5e94\u7528\u3002\u98de\u5229\u6d66\u51c6\u5907\u628a\u7814\u53d1\u4efb\u52a1\u4eceNatlab\u8f6c\u5230S&amp;I\u4ee5\u7ee7\u7eed\u7814\u53d1\uff0c\u5f53\u65f6S&amp;I\u4e8b\u4e1a\u90e8\u7684\u8463\u4e8b\u4e4b\u4e00\uff0c\u9886\u5bfcS&amp;I\u7684\u5de5\u4e1a\u6570\u636e\u7cfb\u7edf\uff08IDS\uff09\u4e8b\u4e1a\u90e8\u7684\u7ef4\u59c6\u00b7\u7279\u7f57\u65af\u7279\u627f\u62c5\u4e0b\u4e86\u8fd9\u4e2a\u8270\u5de8\u7684\u4efb\u52a1\u3002\u5f53\u65f6\u5168\u4e16\u754c\u90fd\u8ba4\u4e3a\u5149\u5b66\u5149\u523b\u6280\u672f\u53ea\u662f\u4e00\u4e2a\u4e34\u65f6\u89e3\u51b3\u65b9\u6848\uff0c\u5f88\u5feb\u4f1a\u88ab\u7535\u5b50\u675f\u3001\u79bb\u5b50\u6216X\u5c04\u7ebf\u6210\u50cf\u6280\u672f\u4ee3\u66ff\uff0c\u5c31\u662f\u5728\u8fd9\u79cd\u6280\u672f\u80cc\u666f\u975e\u5e38\u4e0d\u786e\u5b9a\u7684\u60c5\u51b5\u4e0b\uff0c\u4ed6\u4e0e\u5404\u79cd\u56f0\u96be\u4f5c\u6597\u4e89\uff0c\u5ef6\u7eed\u4e86\u5149\u5b66\u5149\u523b\u6280\u672f\u7684\u53d1\u5c55\u3002<\/p>\n\n\n\n<p>\u7279\u7f57\u65af\u7279\u662f\u4e00\u4e2a\u5de5\u4f5c\u72c2\uff0c\u4ed6\u6709\u7740\u65e0\u9650\u7684\u7cbe\u529b\u548c\u975e\u51e1\u7684\u804c\u4e1a\u9053\u5fb7\uff0c\u7ecf\u5e38\u52a0\u73ed\u52308\u70b9\u624d\u5230\u5bb6\uff0c\u5373\u4f7f\u5728\u665a\u996d\u540e\uff0c\u5de5\u4f5c\u4e5f\u586b\u6ee1\u4e86\u4ed6\u7684\u4e1a\u4f59\u65f6\u95f4\u3002\u4ed6\u9002\u65f6\u5730\u5c06\u9879\u76ee\u4e00\u4e2a\u53c8\u4e00\u4e2a\u5730\u63fd\u5165\u4ed6\u5206\u7ba1\u7684\u90e8\u95e8\uff0c\u6293\u4f4f\u6bcf\u4e00\u4e2a\u53ef\u4ee5\u8d5a\u94b1\u7684\u673a\u4f1a\uff0c\u9f13\u52b1\u548c\u652f\u6301\u4ed6\u7684\u5458\u5de5\u5c1d\u8bd5\u5404\u79cd\u5404\u6837\u7684\u9879\u76ee\u3002\u4ed6\u5bf9\u5f53\u65f6\u793e\u4f1a\u6240\u5ba3\u626c\u7684\u4ef7\u503c\u89c2\u6df1\u4fe1\u4e0d\u7591\uff1a\u8de8\u56fd\u516c\u53f8\u6709\u8d23\u4efb\u4e3a\u793e\u4f1a\u670d\u52a1\uff0c\u5fc5\u987b\u63d0\u4f9b\u548c\u4fdd\u969c\u5c31\u4e1a\u3002\u4e8e\u662f\uff0c\u4ed6\u7ecf\u5e38\u51fa\u73b0\u5728\u4eba\u529b\u8d44\u6e90\u90e8\u95e8\uff0c\u4ece\u5197\u4f59\u5458\u5de5\u7684\u5361\u7247\u76ee\u5f55\u4e2d\u6311\u9009\u9002\u5408\u65b0\u9879\u76ee\u7684\u4eba\u3002<\/p>\n\n\n\n<p>\u572820\u4e16\u7eaa70\u5e74\u4ee3\u4e2d\u671f\uff0c\u7279\u7f57\u65af\u7279\u7684\u4e1a\u52a1\u904d\u53ca\u6b27\u6d32\u3002S&amp;I\u5728\u5fb7\u56fd\u548c\u7231\u5c14\u5170\u5e2e\u52a9\u4e73\u54c1\u5de5\u5382\u5b9e\u73b0\u4e86\u81ea\u52a8\u5316\uff0c\u5728\u6bd4\u5229\u65f6\u5e2e\u52a9\u94a2\u94c1\u5382\u5b9e\u73b0\u4e86\u81ea\u52a8\u5316\uff0c\u5e76\u5728\u610f\u5927\u5229\u5efa\u7acb\u4e86\u73af\u5883\u76d1\u6d4b\u7f51\u7edc\u3002<\/p>\n\n\n\n<p>\u7279\u7f57\u65af\u7279\u6709\u4e00\u7b14\u9690\u85cf\u7684\u50a8\u5907\u91d1\uff1a\u98de\u5229\u6d66\u5b9e\u884c\u975e\u5e38\u8be6\u7ec6\u7684\u8bb0\u5f55\u5236\u5ea6\uff0c\u5bf9\u6210\u672c\u3001\u9884\u7b97\u3001\u5c0f\u65f6\u5de5\u8d44\u548c\u6536\u5165\u8fdb\u884c\u4e25\u683c\u7684\u8d22\u52a1\u68c0\u67e5\uff0c\u4f46\u98de\u5229\u6d66\u7684\u8d22\u52a1\u90e8\u95e8\u5f88\u96be\u5bf9\u7279\u7f57\u65af\u7279\u7684\u90e8\u95e8\u8fdb\u884c\u4e25\u5bc6\u76d1\u7763\uff0c\u56e0\u4e3a\u4ed6\u7684\u9879\u76ee\u6709\u65f6\u4f1a\u5ef6\u8bef\uff0c\u800c\u4e14\u9700\u6c42\u4e5f\u4f1a\u4e0d\u65ad\u53d8\u5316\u3002\u8fd9\u4e00\u4f8b\u5916\u4f7fS&amp;I\u5728\u89c4\u5219\u4e0a\u6709\u4e86\u4e00\u5b9a\u7a0b\u5ea6\u7684\u81ea\u7531\u3002\u4ee5\u9632\u9879\u76ee\u51fa\u73b0\u7d27\u6025\u60c5\u51b5\uff0c\u7279\u7f57\u65af\u7279\u4fdd\u7559\u7740\u4e00\u7b14\u9690\u85cf\u7684\u50a8\u5907\u91d1\u3002<\/p>\n\n\n\n<p>\u8fd9\u4e9b\u50a8\u5907\u91d1\u4e3a\u7279\u7f57\u65af\u7279\u63d0\u4f9b\u4e86\u5f88\u5927\u7684\u64cd\u4f5c\u7a7a\u95f4\uff0c\u4ed6\u751a\u81f3\u53ef\u4ee5\u6295\u8d44\u4e00\u5206\u94b1\u4e0d\u8d5a\u7684\u6d3b\u52a8\u3002\u5f53\u7279\u7f57\u65af\u7279\u4eceNatlab\u90a3\u91cc\u63a5\u624b\u6b65\u8fdb\u5149\u523b\u673a\u65f6\uff0c\u4ed6\u5c31\u5229\u7528\u9690\u85cf\u7684\u50a8\u5907\u91d1\u6765\u7ef4\u6301\u5176\u7814\u53d1\u3002\u516c\u53f8\u7684\u8d22\u52a1\u4e3b\u7ba1\u4eec\u77e5\u9053\u8fd9\u4ef6\u4e8b\u540e\uff0c\u4e5f\u53ea\u80fd\u6cae\u4e27\u5730\u770b\u7740\u3002\u5c3d\u7ba1\u4ed6\u4eec\u4e0d\u8d5e\u6210\u7279\u7f57\u65af\u7279\u7684\u884c\u4e3a\uff0c\u4f46\u6ca1\u6709\u4eba\u80fd\u52a8\u4ed6\uff1a\u4ed6\u4eec\u90fd\u4f9d\u8d56\u4ed6\u4e3a\u516c\u53f8\u521b\u9020\u7684\u4e1a\u7ee9\u3002\u5728\u59cb\u7ec8\u672a\u6709\u8ba2\u5355\uff0c\u751a\u81f3\u98de\u5229\u6d66\u81ea\u5df1\u7684\u6676\u5706\u5382\u4e5f\u4e0d\u4e70\u7684\u60c5\u51b5\u4e0b\uff0c\u4ed6\u4e00\u76f4\u575a\u6301\u6b65\u8fdb\u5149\u523b\u673a\u7684\u7814\u53d1\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.2 \u7279\u7f57\u65af\u7279\u7684\u4fe1<\/h2>\n\n\n\n<p>\u7279\u7f57\u65af\u7279\u7684\u56e2\u961f\u4eceElcoma\u627e\u5230\u4e864\u53f0SiRe1\u7684\u590d\u5236\u54c1\uff0c\u6d4b\u8bd5\u540e\u53d1\u73b0\u90fd\u4e0d\u80fd\u5de5\u4f5c\u3002\u7136\u540e\u4ed6\u8003\u8651\u5bfb\u6c42\u5916\u90e8\u5408\u4f5c\uff0cIBM\u5f53\u65f6\uff081978\u5e74\uff09\u7ecf\u8425\u7740\u4e16\u754c\u4e0a\u6700\u5148\u8fdb\u7684\u6676\u5706\u5382\uff0c\u7ecf\u8fc7\u6c9f\u901a\u540e\uff0cIBM\u540c\u610f\u4f7f\u7528\u4ed6\u4eec\u7684\u673a\u5668\uff0c\u4f46\u662f\u8fd9\u53f0\u673a\u5668\u5fc5\u987b\u57281982\u5e746\u67088\u65e5\u53d1\u8d27\u3002<\/p>\n\n\n\n<p>\u5f53\u65f6\u6709\u5149\u5b66\u5149\u523b\u548c\u7535\u5b50\u675f\u76f4\u5199\u4e24\u79cd\u6280\u672f\u8def\u7ebf\u3002\u524d\u8005\u5df2\u6709\u539f\u578b\u673a\u53ef\u7528\uff0c\u5373\u7531Natlab\u7814\u53d1SiRe2\u548c\u7531S&amp;I\u7814\u53d1\u7684SiRe2\u7684\u5de5\u4e1a\u7248\u672cPAS2000\uff1b\u540e\u8005\u4e5f\u6709\u6280\u672f\u56e2\u961f\u5728\u505a\uff0c\u867d\u7136\u7535\u5b50\u675f\u76f4\u5199\u7684\u7cbe\u5ea6\u4f18\u52bf\u660e\u663e\uff0c\u4f46\u5176\u901f\u5ea6\u592a\u6162\uff0c\u4e0d\u80fd\u6ee1\u8db3\u5f53\u65f6\u65fa\u76db\u7684\u5546\u4e1a\u9700\u6c42\u3002<\/p>\n\n\n\n<p>\u4e24\u4e2a\u56e2\u961f\u7ecf\u5e38\u5173\u4e8e\u6280\u672f\u8def\u7ebf\u7684\u95ee\u9898\u5435\u5f97\u4e0d\u53ef\u5f00\u4ea4\uff0c\u5bfc\u81f4\u5de5\u4f5c\u96be\u4ee5\u63a8\u8fdb\u3002\u8fd9\u65f6\u5019\uff0c\u7279\u7f57\u65af\u7279\u4e3a\u4e86\u5c06\u6bcf\u4e2a\u4eba\u90fd\u8c03\u6574\u5230\u4e00\u81f4\u7684\u65b9\u5411\uff0c\u5199\u4e86\u4e00\u5c01\u81ed\u540d\u662d\u8457\u7684\u4fe1\uff0c\u5f3a\u5236\u9009\u62e9\u4e86\u5149\u5b66\u5149\u523b\u65b9\u6848\uff0c\u8981\u6c42\u5176\u5728SiRe2\u7684\u57fa\u7840\u4e0a\u5f00\u53d1\u5176\u5de5\u4e1a\u7248\u672cPAS2000\uff0c\u5e76\u4e14\u653e\u5f03\u4e86\u7535\u52a8\u6676\u5706\u53f0\u65b9\u6848\uff0c\u7ee7\u7eed\u91c7\u7528\u6db2\u538b\u65b9\u6848\uff0c\u5c3d\u7ba1\u540e\u8005\u6709\u5f88\u591a\u7f3a\u70b9\u3002<\/p>\n\n\n\n<p>\u7279\u7f57\u65af\u7279\u8981\u6c42\u56e2\u961f\u5728\u5f00\u59cb\u63d0\u51fa\u65b0\u60f3\u6cd5\u4e4b\u524d\uff0c\u5f97\u5148\u9020\u51faNatlab\u539f\u578b\u673a\u7684\u7cbe\u786e\u590d\u5236\u54c1\u3002\u4f46\u76f4\u52301980\u5e74\uff0cS&amp;I\u751a\u81f3\u8fde\u4e00\u53f0\u80fd\u6b63\u5e38\u542f\u52a8\u548c\u8fd0\u884c\u7684\u673a\u5668\u90fd\u6ca1\u6709\u5236\u9020\u51fa\u6765\u3002\u56e2\u961f\u610f\u8bc6\u5230\uff0c\u82af\u7247\u6210\u50cf\u7cfb\u7edf\u7684\u7814\u53d1\u53ef\u80fd\u6bd4\u98de\u673a\u548c\u7535\u8bdd\u4ea4\u6362\u673a\u96be\u3002\u800c\u4e14\u5f53\u65f6\u4eba\u529b\u8d44\u6e90\u4e5f\u4e0d\u591f\uff1a\u6b65\u8fdb\u5149\u523b\u673a\u9879\u76ee\u53ea\u6709\u51e0\u4e2a\u4eba\uff0c\u800c\u7535\u5b50\u675f\u76f4\u5199\u673a\u9879\u76ee\u5374\u6709\u51e0\u5341\u4e2a\u4eba\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.3 GCA\u6253\u51fa\u5236\u80dc\u724c<\/h2>\n\n\n\n<p>1978\u5e74\uff0cGCA\u7684David Mann\u516c\u53f8\u7684DSW 4800\uff08Direct Step to Wafer\uff09\u7814\u53d1\u6210\u529f\uff0c\u8fd9\u662f\u4e16\u754c\u4e0a\u7b2c\u4e00\u53f0\u5546\u7528\u6b65\u8fdb\u5149\u523b\u673a\u3002<\/p>\n\n\n\n<p>\u8be5\u673a\u5668\u7684\u6280\u672f\u5176\u5b9e\u5e76\u4e0d\u591f\u5148\u8fdb\uff0c\u7cbe\u5ea6\u6709\u4e9b\u4f4e\uff0c\u6709\u4e9b\u6280\u672f\u95ee\u9898\u5904\u7406\u5f97\u4e5f\u6bd4\u8f83\u7c97\u7cd9\u3002\u4f46\u6027\u80fd\u5df2\u7ecf\u8db3\u591f\u597d\uff0c\u4e14\u8bbe\u8ba1\u7b80\u5355\u3001\u5bb9\u6613\u5236\u9020\u3001\u76f8\u5f53\u4fbf\u5b9c\uff0c\u53ef\u4ee5\u5c3d\u5feb\u63a8\u5411\u5e02\u573a\u3002<\/p>\n\n\n\n<p>David Mann\u662f\u5f53\u65f6\u552f\u4e00\u4e00\u5bb6\u80fd\u591f\u4ea4\u4ed8\u6b65\u8fdb\u5149\u523b\u673a\u7684\u516c\u53f8\u3002\u5728\u7b2c\u4e00\u4e2a\u5ba2\u6237\u5fb7\u5dde\u4eea\u5668\u83b7\u5f97\u597d\u8bc4\u4e4b\u540e\uff0cDavid Mann\u7684\u4ea7\u54c1\u8fc5\u901f\u98ce\u9761\u5e02\u573a\uff0cIBM\u3001\u4ed9\u7ae5\u534a\u5bfc\u4f53\u3001\u56fd\u5bb6\u534a\u5bfc\u4f53\uff0c\u751a\u81f3\u6b27\u6d32\u7684\u897f\u95e8\u5b50\u90fd\u6210\u4e3a\u4e86\u5b83\u7684\u5ba2\u6237\u3002\u5f88\u5feb\uff0c\u8be5\u516c\u53f8\u7684\u4ea7\u80fd\u5c31\u8ddf\u4e0d\u4e0a\u9700\u6c42\u4e86\u3002<\/p>\n\n\n\n<p>\u572820\u4e16\u7eaa70\u5e74\u4ee3\u672b\u548c80\u5e74\u4ee3\u521d\uff0c\u5f53S&amp;I\u8fd8\u5728\u624b\u5fd9\u811a\u4e71\u5730\u8bd5\u56fe\u8ba9\u5176PAS 2000\u80fd\u6b63\u5e38\u5de5\u4f5c\u65f6\uff0cDavid Mann\u7684\u8bbe\u5907\u5df2\u7ecf\u83b7\u5f97\u4e86\u524d\u6240\u672a\u6709\u7684\u6210\u529f\u3002\u6b64\u65f6\uff0cDavid Mann\u7684\u6b65\u8fdb\u5149\u523b\u673a\u8fd8\u83b7\u5f97\u4e86\u4e00\u4e2a\u65b0\u7684\u540d\u79f0\u2014\u2014GCA\u6b65\u8fdb\u5149\u523b\u673a\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.4 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href=\"https:\/\/www.bilibili.com\/video\/BV13X4y1u7pb\">\u76f4\u7ebf\u7535\u673a\u626b\u76f2<\/a>\uff09\uff0c\u7b80\u5355\u6765\u8bb2\uff0c\u8fd9\u662f\u4e00\u79cd\u53ef\u4ee5\u6cbf\u7740\u8f68\u9053\u76f4\u7ebf\u8fd0\u52a8\u7684\u7535\u673a\uff0c\u4e3a\u4e86\u6ee1\u8db3\u5149\u523b\u673a\u7684\u4f7f\u7528\u573a\u666f\uff0c\u8fd9\u79cd\u7535\u673a\u8fd8\u9700\u8981\u5177\u5907\u6781\u9ad8\u7684\u79fb\u52a8\u5e73\u7a33\u6027\u548c\u9759\u6001\u7cbe\u5ea6\u3002<\/p>\n\n\n\n<p>\u76f4\u7ebf\u7535\u673a\u7684\u6210\u529f\u7814\u5236\uff0c\u4f7f\u5f97Natlab\u540e\u6765\u7684\u5149\u523b\u673a\u62e5\u6709\u6781\u9ad8\u7684\u52a0\u901f\u5ea6\uff0c\u8fdb\u800c\u4f7f\u5176\u541e\u5410\u91cf\u6bd4\u7ade\u4e89\u5bf9\u624b\u5927\u5f97\u591a\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.5 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class=\"wp-block-heading\">3.6 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class=\"wp-block-heading\">4.\u8fbe\u6210\u534f\u8bae\uff081983~1984\uff09<\/h1>\n\n\n\n<p>ASM\u56fd\u9645\u516c\u53f8\u7684CEO\u662f\u963f\u745f\u00b7\u5fb7\u5c14\u00b7\u666e\u62c9\u591a\u3002\u8fd9\u4e2a\u4eba\u4e5f\u662f\u5de5\u4f5c\u72c2\uff0c\u5403\u996d\u7761\u89c9\u90fd\u5728\u516c\u53f8\u3002\u4ed6\u5bcc\u6709\u5192\u9669\u7cbe\u795e\uff0c1980s\u521d\uff0cASM\u5df2\u7ecf\u5728\u534a\u5bfc\u4f53\u5e02\u573a\u7ad9\u7a33\u4e86\u811a\u8ddf\uff0c\u6536\u5165\u9010\u5e74\u5927\u5e45\u589e\u957f\uff0c\u800c\u540c\u671f\u7684Elcoma\u548c\u98de\u5229\u6d66\u5374\u88c1\u5458\u6570\u5343\u4eba\u3002<\/p>\n\n\n\n<p>\u666e\u62c9\u591a\u4ece1976\u5e74\u5c31\u5f00\u59cb\u5411\u98de\u5229\u6d66\u5bfb\u6c42\u5408\u4f5c\uff0c\u4f46\u98de\u5229\u6d66\u4ece\u672a\u7ed9\u8fc7\u4ed6\u673a\u4f1a\u30021983\u5e74\uff0c\u5f53Natlab\u7ec8\u4e8e\u613f\u610f\u5408\u4f5c\u65f6\uff0cNatlab\u7684\u5149\u523b\u673a\u5df2\u7ecf\u7a77\u9014\u672b\u8def\u4e86\u3002\u6b64\u65f6\uff0c\u98de\u5229\u6d66\u8ba4\u4e3aASM\u89c4\u6a21\u592a\u5c0f\uff0c1980\u5e74\uff0cASM\u7684\u603b\u6536\u5165\u624d3700\u4e07\u7f8e\u5143\uff0c\u800c\u4ec5\u65b0\u4e00\u4ee3\u5149\u523b\u673a\u7684\u7814\u53d1\u8d39\u7528\u5c31\u8d85\u8fc75000\u4e07\u7f8e\u5143\uff0c\u4e0e\u5149\u523b\u673a\u6240\u9700\u7684\u5148\u8fdb\u6280\u672f\u76f8\u6bd4\uff0cASM\u5236\u9020\u7ebf\u710a\u673a\u6240\u9700\u7684\u4e13\u4e1a\u6280\u672f\u7b80\u76f4\u4e0d\u503c\u4e00\u63d0\u3002\u98de\u5229\u6d66\u8ba4\u4e3a\uff0c\u5fb7\u5c14\u00b7\u666e\u62c9\u591a\u4f4e\u4f30\u4e86\u5149\u523b\u673a\u7684\u590d\u6742\u6027\u3002<\/p>\n\n\n\n<p>1983\u5e74\u6625\uff0c\u98de\u5229\u6d66\u5728\u62a5\u7eb8\u4e0a\u770b\u5230ASM\u5728\u7eb3\u65af\u8fbe\u514b\u53d1\u884c\u4e86100\u4e07\u80a1\u80a1\u7968\u7684\u65b0\u95fb\uff0c\u5b83\u4eec\u610f\u8bc6\u5230ASM\u8fd8\u662f\u633a\u6709\u94b1\u7684\uff0c\u4e8e\u662f\u4fbf\u5f00\u542f\u4e86\u5408\u4f5c\u8c08\u5224\uff0cASM\u5f53\u65f6\u5df2\u7ecf\u662f\u98de\u5229\u6d66\u5149\u523b\u673a\u4e1a\u52a1\u7684\u6700\u540e\u4e00\u6839\u7a3b\u8349\u3002<\/p>\n\n\n\n<p>1983\u5e749\u67088\u65e5\uff0c\u98de\u5229\u6d66S&amp;I\u548cASM\u5ba3\u5e03\u5c06\u521b\u7acb\u4e00\u5bb6\u5408\u8d44\u4f01\u4e1a\uff08ASM\u5149\u523b\u7cfb\u7edf\u516c\u53f8\uff0c\u7f29\u5199ALS\uff09\uff0c\u8d1f\u8d23\u7814\u53d1\u3001\u5236\u9020\u5e02\u573a\u9886\u5148\u7684\u5149\u523b\u8bbe\u5907\u3002\u8fd9\u5bb6\u516c\u53f8\u7531\u4e24\u5bb6\u5206\u522b\u6301\u80a150%\uff0cASM\u504f\u9500\u552e\uff0c\u98de\u5229\u6d66\u504f\u7814\u53d1\uff0cASM\u591a\u6b21\u8868\u793a\u60f3\u4f7f\u7528Natlab\u7684\u6280\u672f\uff0c\u4f46\u88ab\u660e\u786e\u62d2\u7edd\u3002\u98de\u5229\u6d66\u5728\u5408\u8d44\u4f01\u4e1a\u7684\u7ba1\u7406\u4e2d\u8868\u73b0\u5f97\u53ca\u5176\u5b98\u50da\u4e3b\u4e49\uff0cASM\u624d\u662f\u771f\u6b63\u5411\u5408\u8d44\u4f01\u4e1a\u6295\u5165\u8d44\u91d1\u7684\u516c\u53f8\uff0c\u98de\u5229\u6d66\u6295\u5165\u7684\u53ea\u662f\u8fc7\u65f6\u7684\u5e93\u5b58\u3001\u6750\u6599\u3001\u6a21\u5757\u3001\u5de5\u4f5c\u65f6\u95f4\uff0c\u4ee5\u53ca17\u53f0\u4e0d\u80fd\u7528\u7684PAS2000\u3002<\/p>\n\n\n\n<p>1984\u5e743\u67089\u65e5\uff0c\u5408\u8d44\u4f01\u4e1a\u7684\u5408\u540c\u7ec8\u7a3f\u624d\u6572\u5b9a\uff0c\u65b0\u516c\u53f8\u88ab\u83b7\u51c6\u4f7f\u7528Natlab\u7684\u6280\u672f\uff0c\u4f46\u9700\u6bcf\u5e74\u5411Natlab\u652f\u4ed8\u6536\u5165\u76841.5%\u4f5c\u4e3a\u7814\u53d1\u8d39\u7528\u3002<\/p>\n\n\n\n<h1 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More<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-3806","post","type-post","status-publish","format-standard","hentry","category-01-"],"_links":{"self":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/posts\/3806","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3806"}],"version-history":[{"count":0,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/posts\/3806\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3806"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3806"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3806"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}