{"id":3892,"date":"2023-09-12T14:16:30","date_gmt":"2023-09-12T06:16:30","guid":{"rendered":"http:\/\/www.wangkaixuan.tech\/?p=3892"},"modified":"2023-09-12T14:16:30","modified_gmt":"2023-09-12T06:16:30","slug":"%e5%85%89%e5%88%bb%e5%b7%a8%e4%ba%ba-02","status":"publish","type":"post","link":"http:\/\/www.wangkaixuan.tech\/?p=3892","title":{"rendered":"\u5149\u523b\u5de8\u4eba-02"},"content":{"rendered":"\n

6.\u622a\u6b62\u671f\u9650\uff081984~1986\uff09<\/h1>\n\n\n\n

6.1 \u5546\u4e1a\u8ba1\u5212<\/h2>\n\n\n\n

1984\u5e74\u590f\uff0c\u65af\u5bc6\u7279\u5411\u8463\u4e8b\u4f1a\u63d0\u4ea4\u4e86\u4e00\u4efd\u96c4\u5fc3\u52c3\u52c3\u7684\u5546\u4e1a\u8ba1\u5212\u3002<\/p>\n\n\n\n

\u4ed6\u8ba4\u4e3a\uff0c\u82af\u7247\u884c\u4e1a\u7684\u84ec\u52c3\u53d1\u5c55\uff0c\u5bf9\u5149\u523b\u673a\u7684\u9700\u6c42\u5341\u5206\u65fa\u76db\uff0c\u524d\u666f\u5341\u5206\u4e50\u89c2\u3002<\/p>\n\n\n\n

\u5728\u4ed6\u7684\u8bbe\u60f3\u4e2d\uff0c\u52301986\u5e741\u67081\u65e5\uff0c\u4e5f\u5c31\u662f\u8ddd\u5f53\u65f618\u4e2a\u6708\u540e\uff0cASML\u53ef\u63a8\u51fa\u9996\u6b21\u53ef\u7528\u4e8eVLSI\u751f\u4ea7\u6d4b\u8bd5\u7684\u673a\u5668\uff0c\u5e76\u4e14\u4e00\u6b21\u6027\u53ef\u5f00\u53d1\u5e76\u5236\u902010~15\u53f0\uff0c\u8fd9\u5728\u5f53\u65f6\u662f\u4e0d\u53ef\u60f3\u8c61\u7684\u3002\u57281986\u5e74\uff0cASML\u53ef\u5356\u51fa60~70\u53f0\u5149\u523b\u673a\uff0c\u516c\u53f8\u53ef\u5b9e\u73b0\u76c8\u5229\u3002\u52301988\u5e74\u5e74\u5e95\uff0c\u516c\u53f8\u4f1a\u5728\u5168\u7403\u5149\u523b\u673a\u5e02\u573a\u4f4d\u5217\u524d\u4e09\u3002\u52301989\u5e74\uff0c\u516c\u53f8\u53ef\u4ed8\u6e05\u6240\u6709\u8d1f\u503a\uff0c\u5728\u6b64\u4e4b\u524d\uff0c\u516c\u53f8\u8d1f\u503a\u8fd8\u4f1a\u8fdb\u4e00\u6b65\u6500\u5347\uff0c\u52301985\u5e74\u5e95\u5de6\u53f3\u8fbe\u5230\u9876\u5cf0\uff0c\u7d2f\u8ba1\u4e8f\u635f\u5c06\u8fbe2000\u4e07\u7f8e\u5143\u3002<\/p>\n\n\n\n

\u4ed6\u8ba4\u4e3a\uff0cASML\u62e5\u6709\u5236\u9020\u5148\u8fdb\u5149\u523b\u673a\u6240\u9700\u7684\u6240\u6709\u5173\u952e\u6280\u672f\uff0c\u56e0\u6b64\u63a8\u51fa\u5e02\u573a\u53ea\u662f\u7ec4\u7ec7\u5de5\u4f5c\u7684\u95ee\u9898\u3002<\/p>\n\n\n\n

\u800c\u4e14\u975e\u5e38\u91cd\u8981\u7684\u4e00\u70b9\u662f\uff0c\u8fd9\u4e2a\u8ba1\u5212\u6ca1\u6709\u66ff\u4ee3\u65b9\u6848\uff0c\u8981\u4e48\u5927\u83b7\u6210\u529f\uff0c\u8981\u4e48\u4e00\u8d25\u6d82\u5730\u3002<\/p>\n\n\n\n

\u8fd9\u9879\u5546\u4e1a\u8ba1\u5212\u5176\u5b9e\u6709\u5f88\u5927\u7684\u95ee\u9898\u3002<\/p>\n\n\n\n

\u4e00\u662f\u8fc7\u5ea6\u4f4e\u4f30\u4e86\u5bf9\u5458\u5de5\u6570\u91cf\u7684\u9700\u6c42\u3002\u52301987\u5e74\u5e74\u672b\uff0c\u4ece\u4e8b\u7814\u53d1\u548c\u751f\u4ea7\u7684\u5de5\u7a0b\u5e08\u7684\u6570\u91cf\u662f1984\u5e74\u9884\u4f30\u6570\u91cf\u76844\u500d\uff08\u9884\u4f3062\uff0c\u5b9e\u9645218\uff09\uff0c\u4ece\u4e8b\u5176\u4ed6\u5c97\u4f4d\uff08\u884c\u653f\u3001\u9500\u552e\u3001\u8425\u9500\uff09\u7684\u6570\u91cf\u662f\u9884\u4f30\u6570\u91cf\u76848\u500d\uff08\u5b9e\u9645162\u4eba\uff09\u3002<\/p>\n\n\n\n

\u4e8c\u662fPAS2000\u7684\u9500\u91cf\u4f30\u8ba1\u8fc7\u5ea6\u4e50\u89c2\u3002\u65af\u5bc6\u7279\u8ba4\u4e3a\uff0c\u5f53\u65f6\u7684\u5149\u523b\u673a\u5e02\u573a\u4ecd\u7136\u662f\u5356\u65b9\u5e02\u573a\uff0c\u82af\u7247\u5236\u9020\u5546\u4f1a\u4ece\u5e02\u573a\u4e0a\u4e70\u4efb\u4f55\u4ed6\u4eec\u80fd\u4e70\u5230\u7684\u8bbe\u5907\u3002\u4ed6\u4eec\u7684PAS2000\u867d\u7136\u91c7\u7528\u6cb9\u538b\u9a71\u52a8\uff0c\u4f46\u5bf9\u51c6\u7cfb\u7edf\u662f\u72ec\u4e00\u65e0\u4e8c\u9065\u9065\u9886\u5148\u7684\uff0c\u5728\u8fd9\u4e2a\u6280\u672f\u9a71\u52a8\u7684\u578b\u7684\u5e02\u573a\u4e2d\uff0c\u82af\u7247\u5236\u9020\u5546\u4f1a\u4e3a\u4e86\u4f7f\u7528\u7684\u5bf9\u51c6\u7cfb\u7edf\u800c\u4e70\u5355\uff0c\u51b5\u4e14\u4ed6\u4eec\u7684\u673a\u5668\u5728\u53ef\u9760\u6027\u3001\u826f\u7387\u3001\u4ea7\u91cf\u4e0a\u9762\u76f8\u6bd4\u7ade\u4e89\u5bf9\u624b\u4e5f\u6709\u4f18\u52bf\u3002\u4ed6\u751a\u81f3\u4e50\u89c2\u5730\u4f30\u8ba1\uff0cASML\u80fd\u5356\u51fa\u51e0\u5341\u53f0\u6cb9\u538b\u9a71\u52a8\u7684PAS2000\uff0c\u8fd9\u4e00\u70b9\u663e\u7136\u662f\u8131\u79bb\u5b9e\u9645\u7684\u3002<\/p>\n\n\n\n

\u8fd9\u9879\u5546\u4e1a\u8ba1\u5212\u8fd8\u5206\u6790\u4e86\u5176\u4ed6\u95ee\u9898\u3002<\/p>\n\n\n\n

\u4f9b\u6c42\u5173\u7cfb\u65b9\u9762\uff0c1984~1985\u5e74\u4ecd\u5c06\u662f\u5356\u65b9\u5e02\u573a\uff0c\u4e4b\u540e\u7531\u4e8e\u7ade\u4e89\u7684\u52a0\u5267\uff0cASML\u76849\u4e2a\u7ade\u4e89\u5bf9\u624b\u53ef\u80fd\u6700\u540e\u53ea\u4f1a\u5269\u4e0b5\u4e2a\u3002\u52301988\u5e74\uff0c\u6700\u597d\u7684\u60c5\u51b5\u4e0bASML\u5c06\u4f1a\u5356\u51fa400\u53f0\u5149\u523b\u673a\uff0c\u6700\u5dee\u7684\u60c5\u51b5\u4e0b\u4e5f\u80fd\u5356\u51fa250\u53f0\u5de6\u53f3\u3002<\/p>\n\n\n\n

\u9500\u552e\u548c\u8425\u9500\u6218\u7565\u65b9\u9762\uff0cASML\u5f3a\u8c03\u65b0\u4ea7\u54c1\u8f83\u4f4e\u7684\u62e5\u6709\u6210\u672c\uff0c\u4e00\u662f\u63d0\u9ad8\u5236\u9020\u901f\u5ea6\uff0c\u4e8c\u662f\u63d0\u9ad8\u5236\u9020\u7cbe\u5ea6\uff0c\u524d\u8005\u53ef\u4ee5\u52a0\u5927\u51fa\u8d27\u91cf\uff0c\u540e\u8005\u53ef\u4ee5\u8282\u7701\u6676\u5706\u7b49\u539f\u6750\u6599\u6210\u672c\u3002\u5982\u679c\u65b0\u4ea7\u54c1\u7684\u62e5\u6709\u6210\u672c\u8db3\u591f\u5730\uff0c\u90a3\u673a\u5668\u7684\u552e\u4ef7\u5c31\u53ef\u4ee5\u5b9a\u7684\u5341\u5206\u9ad8\uff0c\u4ee5\u63d0\u9ad8ASML\u7684\u5229\u6da6\u3002\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u7535\u52a8\u6676\u5706\u53f0\u6280\u672f\u662f\u63d0\u9ad8\u5149\u523b\u673a\u541e\u5410\u91cf\u7684\u57fa\u77f3\uff0c\u800c\u5f53\u65f6\u8fd9\u9879\u5c5e\u4e8eNatlab\u7684\u6280\u672f\u5c1a\u672a\u6210\u719f\uff0c\u8fd8\u4e0d\u80fd\u8fdb\u5165\u5e94\u7528\u9636\u6bb5\u3002<\/p>\n\n\n\n

\u7ade\u4e89\u5bf9\u624b\u65b9\u9762\uff0c\u4ed6\u505a\u51fa\u4e86\u8fd9\u6837\u7684\u5224\u65ad\uff1a\u201c\u6ca1\u6709\u4e00\u4e2a\u4f9b\u5e94\u5546\u62e5\u6709\u7edd\u5bf9\u7684\u4f18\u52bf\u5730\u4f4d\uff0c\u53ea\u6709GCA\u548c\u5c3c\u5eb7\u6709\u9650\u5730\u4f8b\u5916\u201d\u3002\u57fa\u4e8eGCA\u7684\u9884\u6d4b\u57fa\u4e8e\u5176\u826f\u597d\u7684\u58f0\u8a89\uff0c\u4f46\u7531\u4e8e\u5176\u540e\u6765\u7684\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\u4ea7\u54c1\u6027\u80fd\u4e0d\u4f73\uff0c\u51e0\u5e74\u540e\u5c31\u9000\u51fa\u4e86\u5e02\u573a\u3002\u57fa\u4e8e\u5c3c\u5eb7\u7684\u9884\u6d4b\u57fa\u4e8e\u5176\u58f0\u8a89\u4e0d\u4f73\u7684\u7b2c\u4e00\u4ee3\u4ea7\u54c1\uff0c\u5176\u5b9e\u4ed6\u4e0d\u77e5\u9053\u5c3c\u5eb7\u5728\u7814\u53d1\u7684\u65b0\u673a\u5668\u7684\u5b9e\u529b\u3002<\/p>\n\n\n\n

\u6280\u672f\u8d8b\u52bf\u65b9\u9762\uff0c\u6295\u5f71\u626b\u63cf\u6280\u672f\u7531\u4e8e\u6676\u5706\u8d8a\u6765\u8d8a\u5927\uff0c\u673a\u5668\u7684\u6027\u80fd\u4e5f\u6fd2\u4e34\u6781\u9650\uff0c\u5e02\u573a\u89c4\u6a21\u9884\u8ba11983~1984\u5e74\u5c31\u4f1a\u5230\u8fbe\u9876\u5cf0\uff0c\u5149\u5b66\u5149\u523b\u6280\u672f\u56e0\u4e3a\u53ef\u7528\u5149\u6e90\u6ce2\u957f\u7684\u95ee\u9898\uff0c\u9884\u8ba1\u572810\u5e74\u5185\u4e5f\u5c06\u5230\u9876\uff0c\u672a\u6765\u5c06\u662f\u7535\u5b50\u675f\u548cX\u5c04\u7ebf\u5149\u523b\u7684\u5929\u4e0b\uff0c\u9884\u8ba11990\u5e74\u5149\u5b66\u5149\u523b\u6280\u672f\u4f1a\u5230\u8fbe\u9876\u5cf0\uff0c2000\u5e74\u8d70\u5411\u5c3d\u5934\uff0c\u7535\u5b50\u675f\u548cX\u5c04\u7ebf\u7b49\u65b0\u6280\u672f\u5c06\u57281994\u5e74\u8d85\u8fc7\u5149\u5b66\u5149\u523b\u3002<\/p>\n\n\n\n

\u5e02\u573a\u6c34\u5e73\u65b9\u9762\uff0c1984\u5e74\uff0c\u5f53\u65f6\u6700\u597d\u7684\u82af\u7247\u52a0\u5de5\u5de5\u827a\u7684\u52a0\u5de5\u7cbe\u5ea6\u4e3a1000~1500nm\uff0c\u4f7f\u7528\u7684\u6b65\u8fdb\u5f0f\u5149\u523b\u673a\u7684\u53e0\u52a0\u7cbe\u5ea6\u4e3a350nm\uff0c1988\u5e74\uff0c\u8fd9\u4e00\u6570\u636e\u5206\u522b\u662f800nm\u548c200nm\u3002<\/p>\n\n\n\n

\u4ea7\u4e1a\u5206\u5de5\u65b9\u9762\uff0cASML\u6df1\u77e5\u81ea\u5df1\u5236\u9020\u4e00\u5207\u662f\u4e0d\u53ef\u80fd\u7684\uff0c\u56e0\u6b64\u5b83\u4eec\u9009\u62e9\u5c3d\u53ef\u80fd\u591a\u5730\u4f7f\u7528\u5916\u5305\uff0c\u8fd9\u662f\u516c\u53f8\u6210\u7acb\u65f6\u5c31\u786e\u5b9a\u7684\u5173\u952e\u6218\u7565\u4e4b\u4e00\u3002\u4e0d\u4ec5\u662f\u5355\u4e2a\u96f6\u4ef6\uff0c\u6574\u4e2a\u5b50\u7ec4\u4ef6\u4e5f\u662f\u53ef\u4ee5\u5916\u5305\u7684\u3002\u7531\u4e8e\u98de\u5229\u6d66\u7684\u8870\u843d\uff0c\u90a3\u4e9b\u4e3a\u98de\u5229\u6d66\u4ee3\u5de5\u7684\u5382\u5546\u5f88\u5927\u4e00\u90e8\u5206\u90fd\u88abASML\u6240\u63a5\u7ba1\u3002ASML\u8457\u540d\u7684\u5916\u5305\u751f\u6001\u7cfb\u7edf\u7684\u79cd\u5b50\u5c31\u662f\u5728\u90a3\u4e9b\u5e74\u79cd\u4e0b\u7684\u3002<\/p>\n\n\n\n

6.2 \u56de\u5230Elcoma<\/h2>\n\n\n\n

\u65af\u5bc6\u7279\u96c4\u5fc3\u52c3\u52c3\u7684\u5546\u4e1a\u8ba1\u5212\u5728\u98de\u5229\u6d66\u7684\u8001\u670b\u53cb\u5708\u4f20\u5f00\u4e86\uff0c\u65af\u5bc6\u7279\u627e\u51c6\u65f6\u673a\u62dc\u8bbf\u4e86Elcoma\uff0c\u4ed6\u4eec\u627f\u8bfa\u4f1a\u8d2d\u4e70ASML\u7684\u673a\u5668\uff0c\u53ea\u8981\u5b83\u80fd\u591f\u6309\u65f6\u4ea4\u8d27\u3002\u5f53\u65f6\u98de\u5229\u6d66\u6b63\u5728\u8fd0\u8425\u4e00\u4e2a\u96c4\u5fc3\u52c3\u52c3\u7684\u9879\u76ee-Megachip\uff0c\u8fd9\u662f\u4e00\u4e2a\u5185\u5b58\u82af\u7247\u4ea7\u54c1\uff0c\u56e0\u4e3a\u53ef\u4ee5\u5b58\u50a8100\u4e07\u6bd4\u7279\u7684\u6570\u636e\u800c\u5f97\u540d\uff0c\u8fd9\u4e2a\u9879\u76ee\u6709\u7740\u9ad8\u8fbe7\u4ebf\u7f8e\u5143\u7684\u9884\u7b97\u3002\u98de\u5229\u6d66\u544a\u8bc9\u65af\u5bc6\u7279\uff0cASML\u9700\u8981\u57281984\u5e744\u67081\u65e5\u4ea4\u4ed8\u4e00\u53f0PAS2500\u5149\u523b\u673a\uff0c\u5426\u5219\u4ed6\u4eec\u5c31\u4f1a\u9009\u62e9\u5c3c\u5eb7\u7684\u4ea7\u54c1\u3002\u98de\u5229\u6d66\u7ed9\u4e86\u65af\u5bc6\u7279\u6781\u9ad8\u7684\u9884\u7b97\uff0cASML\u8fd9\u5bb6\u5408\u8d44\u4f01\u4e1a\u540e\u6765\u4e5f\u591a\u6b21\u83b7\u5f97\u6765\u81ea\u98de\u5229\u6d66\u7684\u652f\u6301\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

6.\u622a\u6b62\u671f\u9650\uff081984~1986\uff09 6.1 \u5546\u4e1a\u8ba1\u5212 1984\u5e74\u590f\uff0c\u65af\u5bc6\u7279\u5411\u8463\u4e8b\u4f1a\u63d0\u4ea4\u4e86\u4e00\u4efd\u96c4\u5fc3\u52c3\u52c3\u7684\u5546\u4e1a\u8ba1\u5212\u3002 \u4ed6\u8ba4\u4e3a\uff0c\u82af\u7247\u884c\u4e1a\u7684\u84ec\u52c3\u53d1\u5c55\uff0c\u5bf9\u5149\u523b\u673a\u7684\u9700\u6c42\u5341\u5206…<\/p>\n

Read More Read More<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-3892","post","type-post","status-publish","format-standard","hentry","category-01-"],"_links":{"self":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/posts\/3892","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3892"}],"version-history":[{"count":0,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=\/wp\/v2\/posts\/3892\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3892"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3892"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.wangkaixuan.tech\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3892"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}